Ion-solid interactions by James K. Hirvonen, James Mayer, Michael Nastasi

Ion-solid interactions



Download Ion-solid interactions




Ion-solid interactions James K. Hirvonen, James Mayer, Michael Nastasi
Language: English
Page: 567
Format: djvu
ISBN: 052137376X, 9780521373760
Publisher: Cambridge University Press

Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated circuit technology, ion beams can modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties. Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text covers the fundamentals and applications of ion-solid interactions, and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis.

Book Description

This book describes how materials from semiconductors to tool steels can be modified to create new materials. Its main purpose is to describe how ion beams penetrate into the material and modify its properties. Its importance is that it is the first book in two decades that describes completely the implantation process which is used universally in semiconductor production and now is used to modify metals for commercial applications. It differs from most of the competing books as it is a textbook for students and specialist rather than an edited volume of a collection of papers.

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